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Energy Dispersive X-ray Spectroscopy (EDS)

Phenom Knowledge Base

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Phenom Desktop SEM

Energy Dispersive X-Ray Spectroscopy

Energy dispersive X-ray spectroscopy or Energy dispersive spectroscopy (EDS or EDX) provides elemental composition information by analyzing the X-rays released by a sample when hit by the electron beam. This is a fast, accurate and non-destructive method for identifying compounds on a micron-scale.

The advanced technology of both our CeB6 and FEG sources, provide high x-ray count rates, greatly shortening the time to results over traditional tungsten-based systems. The fully integrated silicon drift detector (SDD) with an ultra-thin window allows detection of elements B to Cf. Even over large areas, actionable data can be collected in less 60 seconds.

The elemental analysis software and hardware are fully integrated on the Phenoms. The user interface allows seamless switching between image collection and EDS acquisition. The highly tuned peak identification algorithm ensures precise elemental information for any user, regardless of experience level. Detector settings are automatically optimized for the beam conditions used, ensuring the best results every time.

Fast Results

High X-ray count rates provide results quickly, even over large areas

One Click Analysis

A fully integrated workflow ensures that collecting and interpretating data is fast and accurate

Full Flexibility

Import project files into open-source software, such as Hyperspy, for flexible data processing

Intuitive Software

Elemental Analysis Software

Regardless of the user’s experience level, the Phenom’s elemental analysis software provides high quality results with its user-friendly integrated interface. Quickly analyze foreign materials in samples, inclusions, multilayer coatings, multiphase interfaces, and more.

Four Powerful Analysis Modes
  • Spot – quickly identify the elemental composition in a specific spot
  • Region – Determine the average elemental composition of a larger area
  • Line – Plot changes in elemental abundances along a line
  • Map – Visualize all elements present in a sample

Elemental Mapping

Composite of the Energy Dispersive X-Ray spectroscopy mapping with labels for the respective elements present.
Elemental Abundance Map of Al, Mg, Fe, Ni, A, Cr, and Ca
The map above shows the complex phases present in a meteorite. Energy dispersive x-ray spectroscopy mapping allows for the quick separation of phases even in the most elementally diverse samples.

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Energy Dispersive X-ray Spectroscopy Detector

Easy Data Management

Project editing

Data is automatically organized within a project by associating each EDS collection with an image. Easily add and remove new images and EDS analyses within your open project.

Offline Analysis

Add and remove elements from fits, perform spectral subtraction, extract area spectra from saved maps and change map colors using any PC.

Automatic Report Generation

Saving a project file automatically generates a report which can be easily edited in Microsoft Word

Accessible raw data

Saving a project also automatically exports the raw data in the EMSA file format, enabling the use of advanced EDS postprocessing in any compatible software.

EDS Detector Compatibility

Compatible Phenom Models

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