Optical Profilometers

The Zeta 3D optical profiler systems offer high performance 3D metrology and imaging for non-contact qualitative sub-micron surface analysis:

  • Surface roughness and profiling
  • Volume measurements
  • Step/feature height and depth
  • Dimensions
  • Slope/angle

The Zeta 3D systems have fast, true-color 3D imaging in less than 30 seconds with a large dynamic range, from nm to mm scale features and field of view. With patented focusing technology, referred to as ZDot, imaging contrast is generated independent of the sample to provide high resolution height measurements. 

Zeta 3D metrology systems have greater light throughput than confocal microscopes, white light interferometers or other optical profilers. Because of high light throughput and proprietary design, Zeta 3D optical profilers are inherently insensitive to vibration and sample tilt.

Zeta3D PSS metrology

Zeta 3D optical profiler image of patterned sapphire substrate (PSS)

Applying advanced and innovative 3D imaging and measuring technology, the Zeta optical profiler meets the needs of challenging surface analysis. The Zeta 3D systems are ideal for analyzing complex surfaces such as:

  • LED patterned/etched substrates
  • Photo-resist and stacked structures
  • Transparent surfaces
  • Patterned sapphire substrates (PSS) bump diameter, height and pitch analysis
  • Microfluidics transparent multi-surface profiling
  • High aspect ratio samples such as microneedles
Compare Models
Compare Models

Compare the Zeta 20 vs Zeta 300 for your application

Zeta-20 Benchtop Profiler
Zeta-20 Benchtop Profiler

3D Optical Profiler on your benchtop

Zeta-300 Floor Model Profiler
Zeta-300 Floor Model Profiler

With vibration isolation for precise surface metrology

Why Zeta
Why Zeta

Core technology of Zeta 3D systems