The Zeta 3D optical profiler systems offer high performance 3D metrology and imaging for non-contact qualitative sub-micron surface analysis:
The Zeta 3D systems have fast, true-color 3D imaging in less than 30 seconds with a large dynamic range, from nm to mm scale features and field of view. With patented focusing technology, referred to as ZDot, imaging contrast is generated independent of the sample to provide high resolution height measurements.
Zeta 3D metrology systems have greater light throughput than confocal microscopes, white light interferometers or other optical profilers. Because of high light throughput and proprietary design, Zeta 3D optical profilers are inherently insensitive to vibration and sample tilt.
Zeta 3D optical profiler image of patterned sapphire substrate (PSS)
Applying advanced and innovative 3D imaging and measuring technology, the Zeta optical profiler meets the needs of challenging surface analysis. The Zeta 3D systems are ideal for analyzing complex surfaces such as: