3D Automation and Options
Automation options can be added to customize an optical metrology package for your application requirements. Some Automation features require hardware accessories. Options include but are not limited to:
Automated Optical Inspection (AOI) combines metrology with defect inspection. This feature has an 8 mm field of view (FOV) with a defect sensitivity of 1 micron.
Measurement results from metrology and inspection can be combined to grade and sort your products automatically without the tedious data management from various separate tools. This combination lowers the cost of inspection as optics, handlers, and software cost can be shared. AOI used with our metrology tools minimizes handling of your products, lowering risk of handling damage and contamination.
Defect inspection using automated optical inspection (AOI) for the Zeta 3D optical profiler
The Stitching feature, used in combination with the motorized XY stage, allows for imaging and characterization over a large sample size. The Stitching software is available on all Zeta systems. Up to 56 images may be stitched together with automatic software adjustment to integrate the scans. Stitching images together can also be adjusted manually. This feature enables image display and analysis, such as roughness and step heights, over a large area.
Example of stitching feature for Zeta 3D optical profilers
Imaging and measurements can be programmed to run in sequences using the motorized XY stage. Standard measurement sequences include rectangular grid, radial, and hexagonal grid patterns.
Hardware accessories can be added to customize an optical metrology package for your application requirements.
The motorized XY stage is programmed to be in sync with the instrument. The stage is convenient for locating areas of interest on samples. A motorized XY stage is optional for the Zeta-20 and standard on the other optical metrology tools. Different sizes are available; contact us with your requirements.
Large motorized stage for Zeta-20 3D optical profiler
A motorized XY stage for Zeta 3D optical profilers is:
- Compatible with all optical metrology modes
- Used for pattern recognition
- Recommended for Stitching feature
- Required for Sequencing Patterns
For imaging liquid or viscous materials, the swivel head option can tilt the optical components while the stage remains stationary. The swivel head allows angled measurements of samples that would be altered by tilting the stage.
Zeta-20 3D optical profiler with swivel head option
The motorized turret allows for software control of the lens selection. It is compatible with all optical metrology modes and:
- Assists with pattern recognition
- Is recommended for Stitching feature
- Is required for Sequencing Patterns
The Z Drive is an optional piezoelectric Z axis to provide high resolution measurements in the Z direction. The Z Drive is recommended for Vertical Scanning Interferometry.
A diamond scribe may be attached to the turret to mark a specific sample location. This feature is integrated with the software to track marked locations.
Diamond scribe to mark a sample for the Zeta 3D optical profilers
There are different options for illuminating the sample and stage. Transmitted illumination can be used with a glass plate in the stage. Side lighting is also available.
Zeta-20 3D optical profiler with transmitted illumination