Optical Metrology Modes

Olive Oil on Glass Stitched Image 100x xsection

These modes combine hardware and software options for a variety of applications, including measuring film thickness, surface roughness, and step heights down to the Angstrom scale. In contrast to traditional optical instrumentation, a wide variety of surfaces can be measured using one Zeta system:

  • Low reflectance
  • High reflectance
  • High roughness from mm to nm
  • Transparent
  • Opaque

ZDot focusing technology, described in Why Zeta, is standard on all optical metrology tools. These options provide further customization for your system.

Vertical Scanning Interferometry
Vertical Scanning Interferometry

Measure nanometer heights over a large field of view

Shearing Interferometry
Shearing Interferometry

Nanometer and Angstrom vertical resolution

Thin Film Reflectometry
Thin Film Reflectometry

Fast and accurate thin film measurements