Vertical Scanning Interferometry
ZX5 and ZX100 Modes for Vertical Scanning Interferometry
These modes provide exceptional Z resolution over wide field of view while acquiring data quickly. The field of view ranges from 4.5 mm to 90 microns for typical optical conditions. The Z sensitivity is less than 1 nm.
The piezoelectric Z axis, an accessory for the optical profiler tools, is recommended for the Vertical Scanning Interferometry modes.
ZX5 option with a Michelson interferometer for Zeta 3D optical profilers
The ZX5 mode uses a 5x magnification lens with a Michelson interferometer.
The ZX100 mode uses a 100x magnification lens with a Mirau interferometer.