Zeta-20 Specifications

This summary of specifications are for the benchtop 3D optical profiler. Full specifications and more information for other platforms, options and accessories can be requested with our Contact form.

Zeta-20 with product details

Specifications for standard objectives are shown below. Other options available: long working distance objectives, immersion objectives, and through transmission materials objectives; 0.63X and 1X couplers. *XY resolution is nominal

   NA   Working Distance (mm)   Z resolution for ZDot (µm)   XY resolution (µm)   Optical resolution (µm)   FOV (µm) with 0.35X coupler   FOV (µm) with 0.5X coupler  
1/3" camera 2/3" camera 1/3" camera 2/3" camera
2.5X  0.08  10.7  22  3.60  4.20  5364 x 4024  9394 x 7044  3788 x 2840  6614 x 4960 
5X  0.15  20.0  5.9  1.80  2.20  2682 x 2012  4697 x 3522  1894 x 1420  3307 x 2480 
10X  0.30  11.0 1.5  0.90  1.10  1335 x 1000  2327 x 1745  944 x 708  1644 x 1233 
20X  0.45  3.1  0.5  0.45  0.75  668 x 500  1169 x 877  468 x 351  822 x 616 
50X  0.8  1.0  0.1  0.18  0.42  267 x 200  466 x 349  189 x 142  328 x 246 
100X  0.9 1.0 0.013 0.09  0.37  133 x 100  234 x 175  93 x 70  164 x 123 
150X  0.9  1.0  0.013  0.06  0.37  88 x 66  156 x 116  62 x 46  109 x 82 

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