Compare SEM Models

The Phenom SEMs belong to the XL series or Pro/Pure series.  Which is right for you?

All Phenom SEMs include Never-Lost navigation featuring an optical navigation camera correlated with an integrated motorized stage that enables the user to scan the sample area and move to any spot on the sample with just a single click. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. 

Phenom XL

Phenom XL SEM imaging large or multiple samples

The Phenom XL SEM for large samples

The Phenom XL SEM is equipped with a large chamber that allows automated analysis of large samples of up to 4" x 4” (100 mm) or up to 36 samples mounted on 10 mm pin stubs. The XL is available with:

  • Backscattered electron detector (BSD) - standard for material contrast and topographic imaging
  • Secondary electron detector (SED) - optional
  • EDS detector for energy dispersive x-ray spectroscopy (elemental analysis) - optional

Phenom ProX/Pro/Pure

Phenom ProX with Pro Suite

The Phenom ProX SEM with EDS

Phenom ProX SEM

The ultimate tabletop SEM for imaging with material contrast (BSD) and elemental analysis (EDS). The Phenom ProX is the highest resolution tabletop SEM with the highest EDS count-rates. The Phenom ProX is the world's fastest SEM. There are no infrastructure requirements due to unmatched vibrational stability, providing imaging up to 130,000x magnification.

  • Integrated EDS for elemental analysis
  • Highest resolution
  • Fastest loading 
  • Backscattered electron detector (BSD) for material contrast and topographic imaging
  • Vibrational stability
  • No infrastructure required

Phenom Pro & Pure

The Phenom Pro offers best-in-class SEM imaging. The Phenom Pro has the same features as the ProX (without EDS).

The Phenom Pure is the best entry-level SEM. The base system has 30,000x magnification with an option to image up to 65,000x.

Phenom Pure desktop SEM

The Phenom Pure SEM - the best entry-level desktop SEM

Like the other Phenom SEMs, the Pure is equipped with a high performance electron source that outperforms tungsten SEMs at a better price point. The Pure includes the optical Never-Lost navigation system and these Phenom features:

  • Fastest loading 
  • Backscattered electron detector (BSD) for material contrast and topographic imaging
  • Vibrational stability
  • No infrastructure required

Products

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