Confocal Profilometry

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Schematic of confocal profilometry

Confocal profilometry is a point scanning optical technique used to image the sample surface. It works by using a small aperture, known as a confocal aperture. Highly focused light is projected through the aperture and only surfaces within the focal plane will provide a useful signal. The optics are scanned up and down above the surface until a bright spot is observed. Once a bright spot is observed the instrument calculates the distance to that point on the surface, giving it a point in Z. The optics then scan along the surface laterally while maintaining a bright spot to reconstruct the surface.

Comparison to White Light Interferometry
Comparison to White Light Interferometry

Zeta 3D optical profiler vs WLI

Laser Interferometry
Laser Interferometry

Principles and schematic of laser interferometry

Pattern Projection with Focus Detection
Pattern Projection with Focus Detection

Combination of pattern projection and focus detection

How a Profilometer Works
How a Profilometer Works

Basics of stylus and optical profilometry

Compare Profilometer Technology
Compare Profilometer Technology

Confocal, interferometry, focus detection, pattern projection

Pattern Projection
Pattern Projection

Differences in projected patterns generate 3D images

Focus Detection
Focus Detection

Create 3D images using focal planes

White Light Interferometry
White Light Interferometry

Principles and schematic of white light interferometry

Interferometry
Interferometry

Principles and schematic of interferometry

Confocal Profilometry
Confocal Profilometry

Principles and schematic of confocal profilometry


Technology

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