SEMPREP SMART is equipped with a high-energy and, optionally, a low-energy Ar ion source. This device is an ideal choice for final polishing and cleaning of traditional SEM and EBSD samples. Ion polishing allows for improving and cleaning mechanically polished SEM samples and preparing damage-free surface for EBSD analysis. The device is also suitable for rapid cross-sectional cutting. Outstanding results are possible even in cases requiring high precision and quality, such as semiconductor testing or cross-sectional investigation of Li-ion battery separator membranes.
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