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Energy Dispersive X-ray Spectroscopy (EDS)

Phenom Scanning Electron Microscope

Energy Dispersive X-Ray Spectroscopy (EDS)

Energy dispersive X-ray spectroscopy or Energy dispersive spectroscopy (EDS or EDX) provides elemental composition information by analyzing the X-rays released by a sample when hit by the electron beam. This is a fast, accurate and non-destructive method for identifying elements on a micron-scale.

Fast Results

High X-ray count rates provide results quickly, even over large areas

One-Click Analysis

Fully integrated workflow ensures that collecting and interpretating data is fast and accurate

Real-Time Elemental Mapping

ChemiSEM provides real-time elemental maps over live SEM images, providing instant visualization of sample morphology and composition

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Seamless Integration with Fast Results

The advanced technology of both our CeB6 and FEG sources, provide high x-ray count rates, greatly shortening the time to results over traditional tungsten-based systems. The fully integrated silicon drift detector (SDD) with an ultra-thin window allows detection of elements B to Cf. Even over large areas, actionable data can be collected in less than 60 seconds.

The elemental analysis software and hardware are fully integrated on the Phenoms. The user interface allows seamless switching between image collection and EDS acquisition. The highly tuned peak identification algorithm ensures precise elemental information for any user, regardless of experience level. Detector settings are automatically optimized for the beam conditions used, ensuring the best results every time.

EDS Detector

Product Features

Intuitive Analysis Software

The dedicated Elemental Identification (EID) software controls the fully integrated EDS detector and facilitates step-by-step data collection and analysis within the Phenom UI. With EID, you can identify nearly all elements from Boron (5) to Californium (98). It uses smart algorithms for automatic peak identification, deconvolution of overlapping peaks, background and artifact correction, and drift correction (for mapping) with options for manual adjustments.

Four Powerful Analysis Modes

Discover the versatility of the Energy Dispersive X-ray Analysis software with four powerful analysis modes designed to meet diverse material characterization needs:

  • Spot – quickly identify the elemental composition in a specific spot
  • Region – Determine the average elemental composition of a selected area
  • Line – Plot changes in elemental abundances along a line
  • Map – Visualize spatial distribution of elements present in a sample
ChemiSEM

ChemiSEM is a software capability that combines machine learning and ultrafast signal processing to display real-time elemental maps over live SEM images. This integration enhances the data acquisition experience by providing instant visualization of sample morphology and composition, making it easier to identify areas of interest, detect contaminants, and understand elemental distribution within samples.

ChemiPhase

ChemiPhase (phase mapping) is an advanced analysis tool that goes beyond standard EDS mapping. While EDS shows where individual elements are located, ChemiPhase groups areas with similar elemental compositions to identify distinct phases in a sample. This approach provides a clearer view of the sample’s microstructure, highlighting regions with similar element percentages and offering deepener insights into the material’s properties and behavior.

EDS Detector

Product Knowledgebase

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